| Excel Precision manufactures the 1160A
Weather Station and 1024A Refractometer for laser wavelength compensation. Are you worried about air turbulence dearaofing
your wafer stepper alignment accuracy?
Are you worried about local heat
sources affecting the stage accuracy?
Are you worried about light absorption
affecting the stepper lens working depth of focus?
Excel Precision's patent pending
Weather Station can assist you in resolving these problems! |
The 1160A
Weather Station is an electronic device that measures temperature, relative humidity, and
barometric pressure in real-time. It is very compact, and can be mounted on top of the
plane mirror interferometer, or on the moving X-Y stage. For more accurate position
measurements, one 1161A Sensor Head can be attached to each axis of the interferometer.