About Laser Interferometers......
Today's laser interferometer is based on the technology invented by Michelson over one hundred years ago. Although the theory is much the same, the complexity of the laser interferometer has increased significantly. The laser interferometer utilizes wavelength as a measuring unit to achieve new standards of accuracy, precision and repeatability.
Capable of measuringin six degrees of freedom - pitch, yaw, roll, Horizontal straightness, vertical straightness and x axis linear displacement, laser interferometers can be applied to both close loop servo control and calibration metrology applications. Electronic interfaces provide communication between the user and a computer that monitors the interferometer's measurment outputs and environmental conditions that affect performance. The electronics provides signals and subsequent corrections to the system so that the measurement can be incredibly precise and high performance, whether used for semiconductor, disk drive, machine tool or other industries.