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 Our Signal Processor Card processes the measured
signals and converts them into displacement. In addition to the high resolution at high
measuring speed, the direct interface between the Signal Processor Card and the controller
allows the user to acquire real time information on position, destination, and velocity.
This results in highly accurate
and smooth motion, faster throughput, and increased yields in production. For closed-loop
servo applications, a 32-bit binary output is provided at the top edge of the Signal
Processor Card for comparing current position and the destination in real time to achieve
optimum servo performance.The 1032A
Signal Processor Card achieves a resolution of 0.02 micrometer when the 1011A or 1018A
interferometers are used. A resolution of 0.01 micrometer is achievable with 1012A, 1012C,
1012D, or 1012F interferometers. When the l0l2B High Resolution Plane Mirror
Interferometer is used, the resolution is 0.005 micrometer. The 1032A Signal Processor
Card consumes very low power and is an ideal choice when high accuracy and minimum thermal
effect is important during measurement.
The 1032B achieves two times the
resolution of the 1032A when the above optical configurations are used. |
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The 1036A Fast Pulse Converter extends the resolution from the raw
interference fringes of 0.16 micrometer to as high as 0.001 micrometer (when used with
1012B High Resolution Plane Mirror Interferometer). The 1036A produces very fast signal
output (up to 22. 5 MHz) in real time mode. The Fast Pulse Converter Card can be used as
stand alone circuitry for direct servo applications, or can be used in conjunction with a
1037A Binary Interface Card and 1038A Fast Comparator. Each 1036A Fast Pulse Converter can
serve two axes of measurement. The
1037A Binary Interface Card carries the input/output signals between the computer and the
1041A Card Cage. Only one 1037A is required for each card cage, and can support up to six
axes of measurement (three each of 1036A, and six each of 1038A).
The
1038A Fast Comparator is used for comparing the target position and the instantaneous
position of the moving stage. Difference between these two positions is the "position
error", and becomes the servo signal for the servo electronics. The target position
can be manually input through a computer, or automatically input through an external
sensor. Each axis of measurement requires one each 1038A.
Excel
Precision also provides a 1043A Extension Card for applications that require physical
extension of the above boards to operate outside the 1041A Card Cage. |
