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The
Leading
Manufacturer
of Laser
Interferometers |
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1000A
Laser Measurement System |
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The Excel 1000A
Laser Measurement System is a two-frequency heterodyne laser interferometer system
designed specifically for OEM customers for use in the following equipment: optical wafer
steppers, E-beam lithography systems, I.C. inspection tools, X-ray lithography steppers,
precision measuring machines, disc servowriter systems, and ultra-precision cutting tools.  Excel
1000A Laser System
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| Features
for Stepper Application: |
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- Superior Repeatability. The 1000A Laser Position Measurement System's superior repeatability is
attibuted to the greater accuracy of the 1001A Laser Head. This facilitates the design of
machines with superior positioning performance.
- Higher Slew Rates. The
1001A Laser Head and the 1032A Signal Processor produce higher slew rates, enabling faster
operation of machines resulting in higher wafer throughputs.
- Improved Detector Sensitivity. The 1031A Receiver allows control of more axes of motion with
a single laser head.
- High Resolution. The
1061A VME interface Signal Processor provides 2.5nm resolution when used with the Plane
Mirror Interferometer. This unique feature allows the user to achieve higher accuracy on
stage positioning.
- Compact Laser Head, Reduced Heat Dissipation of Laser Head
and Reduced Power Consumption of System Electronics. These
three outstanding features allow the machine designers to provide a machine with a smaller
footprint and a smaller, less expensive heat removal system.
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| For more detailed information, please contact us.
We will answer your questions about our
quality policy, specifications, applications and ordering. |
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